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1 article(s) from Devoille, Laurent

Development of a new hybrid approach combining AFM and SEM for the nanoparticle dimensional metrology

Loïc Crouzier,
Alexandra Delvallée,
Sébastien Ducourtieux,
Laurent Devoille,
Guillaume Noircler,
Christian Ulysse,
Olivier Taché,
Elodie Barruet,
Christophe Tromas and
Nicolas Feltin

Beilstein J. Nanotechnol. 2019, 10, 1523–1536, doi:10.3762/bjnano.10.150

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Figure 1: Basic principle for measuring the NP height by AFM and NP lateral diameters by SEM.

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Figure 2: Principle of SEM and AFM calibration using the reference structure measured by mAFM.

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Figure 3: Micro-lithographed chips specifically developed for hybrid metrology and used as a repositioning sy...

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Figure 4: Silica FD304 NPs deposited on the repositioning chip for a direct comparison of a) AFM and b) SEM m...

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Figure 5: Comparison of NP height measurements performed by AFM and: (a) D_SEM, (b) D_Fmin, (c) D_Fmax of severa...

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Figure 6: Comparison of AFM height measurement, H_AFM and (a) D_Fmin, (b) D_Fmax on the same sets of PSL and SiO₂...

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Figure 7: Profiles obtained by (a) SEM and (b) AFM, on a single NP of FD304 or PSL with the same diameter mea...

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Figure 8: Profiles obtained by (a) AFM and (b) SEM, on a single NP of FD304 or PSL with the same height measu...

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Figure 9: (a) Comparison of (D_Fmin/D_Fmax), (H_AFM/D_Fmin) and (H_AFM/D_SEM) for each NP population (ERM-FD102, ER...

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Full Research Paper

Published 26 Jul 2019

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